For R&D and failure evaluation in nanofabrication.
Picture Credit score:Quantum Design
The Vista 300 from Molecular Vista is a nano IR instrument focused for superior semiconductor course of monitoring and defect evaluation.
Vista 300 combines an atomic drive microscope with infrared spectroscopy to offer Picture-induced Power Microscopy (PiFM), a method that performs chemical mapping with a spatial decision of
A exceptional demonstration of PiFM is proven within the accompanying photos – PiFM is ready to map the chemical variations between uncovered and unexposed 16 nm half-pitch patterns in EUV resist earlier than the resist is developed. AFM topography reveals no trace of the uncovered sample, however PiFM detects the chemical modifications attributable to EUV publicity.
Vista 300 is designed to deal with full 300 mm wafers however does so in a minimal footprint of just one.1 x 1.1 m2. The instrument is totally developed and prepared for fast orders. Demonstrations of Vista 300 on buyer wafers or different pattern can be found by contacting Dr. Shayz Ikram beneath.
In 2015, MVI was the primary firm to exhibit AutoPiFM functionality identifies supplies and generates chemical maps and chemical fingerprint spectra with minimal consumer enter required. Sit again and let AutoPiFM do the work! Likewise, MVI’s new AutoAlign system routinely and optimally focuses the IR optical beam on the AFM tip, eliminating the necessity for the consumer to be taught the small print of optical alignment. These options make PiFM totally accessible to laboratory or manufacturing technicians.
With extra superior semiconductor processes depending on atomically skinny natural and dielectric layers with more and more smaller function sizes, Vista 300 is an ideal hybrid topography and chemical metrology instrument for characterising Excessive NA EUV lithography, selective atomic layer deposition, Cu-Cu hybrid bonding processes, and sub-100 nm defects.
Dr. Sung Park, CEO of Molecular Vista